YOLO-LA: Prototype-Based Vision–Language Alignment for Silicon Wafer Defect Pattern Detection

With the rapid development of semiconductor manufacturing technology, methods to effectively control the production process, reduce variation in the manufacturing process, and improve the yield rate represent important competitive factors for wafer factories. Wafer bin maps, a method for characteriz...

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Principais autores:	Ziyue Wang, Yichen Yang, Jianning Chu, Yikai Zang, Zhongdi She, Weikang Fang, Ruoxin Wang
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2025-12-01
Serija:	Micromachines
Teme:	semiconductor defect detection wafer bin map YOLO vision language model
Online dostop:	https://www.mdpi.com/2072-666X/17/1/67
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