Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques

The ability to manufacture complex 3D structures with nanometer-scale resolution, such as Fresnel Zone Plates (FZPs), is crucial to achieve state-of-the-art control in X-ray sources for use in a diverse range of cutting-edge applications. This study demonstrates a novel approach combining Electron B...

詳細記述

書誌詳細

主要な著者:	Maha Labani, Vito Clericò, Enrique Diez, Giancarlo Gatti, Mario Amado, Ana Pérez-Rodríguez
フォーマット:	Artigo
言語:	Inglês
出版事項:	MDPI AG 2024-11-01
シリーズ:	Nanomaterials
主題:	electron beam lithography cryogenic etching fresnel zone plates
オンライン･アクセス:	https://www.mdpi.com/2079-4991/14/23/1898
タグ:	タグ追加 タグなし, このレコードへの初めてのタグを付けませんか!