Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor

The technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issu...

תיאור מלא

מידע ביבליוגרפי

Principais autores:	Nikolay Samotaev, Artur Litvinov, Konstantin Oblov, Maya Etrekova, Boris Podlepetsky, Pavel Dzhumaev
פורמט:	Artigo
שפה:	Inglês
יצא לאור:	MDPI AG 2023-01-01
סדרה:	Sensors
נושאים:	field-effect gas sensor laser micromilling pulse laser deposition metal–ceramics package tomography
גישה מקוונת:	https://www.mdpi.com/1424-8220/23/1/514
תגים:	הוספת תג אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!