Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor
The technological approach for the low-scale production of field-effect gas sensors as electronic components for use in non-lab ambient environments is described. In this work, in addition to the mechanical protection of a gas-sensitive structure, an emphasis was also placed on the very topical issu...
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| Autori principali: | , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2023-01-01
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| Serie: | Sensors |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/1424-8220/23/1/514 |
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