Periodic TiO2 Nanostructures with Improved Aspect and Line/Space Ratio Realized by Colloidal Photolithography Technique

This paper presents substantial improvements of the colloidal photolithography technique (also called microsphere lithography) with the goal of better controlling the geometry of the fabricated nano-scale structures—in this case, hexagonally arranged nanopillars—printed in a layer of directly photop...

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Detalhes bibliográficos

Principais autores:	Loïc Berthod, Olga Shavdina, Isabelle Verrier, Thomas Kämpfe, Olivier Dellea, Francis Vocanson, Maxime Bichotte, Damien Jamon, Yves Jourlin
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2017-10-01
coleção:	Nanomaterials
Assuntos:	sol-gel TiO2 sub-wavelength structures colloidal photolithography
Acesso em linha:	https://www.mdpi.com/2079-4991/7/10/316
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