A Novel Self-aligned and Maskless Process for Formation of Highly Uniform Arrays of Nanoholes and Nanopillars
<p>Abstract</p><p>Fabrication of a large area of periodic structures with deep sub-wavelength features is required in many applications such as solar cells, photonic crystals, and artificial kidneys. We present a low-cost and high-throughput process for realization of 2D arrays of deep sub-wavelengt...
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| Glavni autori: | , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
SpringerOpen
2008-01-01
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| Serija: | Nanoscale Research Letters |
| Teme: | |
| Online pristup: | http://dx.doi.org/10.1007/s11671-008-9124-6 |
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