Differential Hall Effect Metrology for Electrical Characterization of Advanced Semiconductor Layers
Semiconductor layers employed in fabricating advanced node devices are becoming thinner and their electrical properties are diverging from those established for highly crystalline standards. Since these properties also change as a function of depth within the film, accurate carrier profiling solutio...
সংরক্ষণ করুন:
| প্রধান লেখক: | , |
|---|---|
| বিন্যাস: | Artigo |
| ভাষা: | Inglês |
| প্রকাশিত: |
MDPI AG
2024-10-01
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| মালা: | Metrology |
| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | https://www.mdpi.com/2673-8244/4/4/34 |
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