Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model
In order to improve quality assurance in wafer manufacturing, there are strict process requirements. Besides the well-known residency time constraints (RTCs), a dual-arm cluster tool also requires each robot arm to execute a specific set of tasks. We call such a tool an arm task-constrained dual-arm...
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| Asıl Yazarlar: | , , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
MDPI AG
2024-09-01
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| Seri Bilgileri: | Mathematics |
| Konular: | |
| Online Erişim: | https://www.mdpi.com/2227-7390/12/18/2912 |
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