Cycle Time Optimization in Scheduling Automated Bench Cleaning Tool for Semiconductor Manufacturing

In the semiconductor wafer manufacturing process, wafer cleaning operation is responsible for removing residues on the surface of wafers after processing. The cleaning time accounts for 30% of the wafer fabrication work, which is significant as other wafer production processes. Wafer cleaning equipm...

Cijeli opis

Bibliografski detalji

Glavni autori:	Luetao Li, Siwei Zhang, Yan Qiao, Naiqi Wu, Jie Li, Yang Bai
Format:	Artigo
Jezik:	Inglês
Izdano:	IEEE 2026-01-01
Serija:	IEEE Access
Teme:	Automated bench cleaning tool semiconductor manufacturing wafer fabrication scheduling
Online pristup:	https://ieeexplore.ieee.org/document/11458700/
Oznake:	Dodaj oznaku Bez oznaka, Budi prvi tko označuje ovaj zapis!