Cycle Time Optimization in Scheduling Automated Bench Cleaning Tool for Semiconductor Manufacturing
In the semiconductor wafer manufacturing process, wafer cleaning operation is responsible for removing residues on the surface of wafers after processing. The cleaning time accounts for 30% of the wafer fabrication work, which is significant as other wafer production processes. Wafer cleaning equipm...
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| Autors principals: | , , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
IEEE
2026-01-01
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| Col·lecció: | IEEE Access |
| Matèries: | |
| Accés en línia: | https://ieeexplore.ieee.org/document/11458700/ |
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