Periodic Scheduling Optimization for Dual-Arm Cluster Tools with Arm Task and Residency Time Constraints via Petri Net Model

In order to improve quality assurance in wafer manufacturing, there are strict process requirements. Besides the well-known residency time constraints (RTCs), a dual-arm cluster tool also requires each robot arm to execute a specific set of tasks. We call such a tool an arm task-constrained dual-arm...

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Κύριοι συγγραφείς:	Lei Gu, Naiqi Wu, Tan Li, Siwei Zhang, Wenyu Wu
Μορφή:	Artigo
Γλώσσα:	Inglês
Έκδοση:	MDPI AG 2024-09-01
Σειρά:	Mathematics
Θέματα:	cluster tools Petri nets scheduling semiconductor manufacturing
Διαθέσιμο Online:	https://www.mdpi.com/2227-7390/12/18/2912
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