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Nanotribological Characteristics of the Al Content of Al<sub>x</sub>Ga<sub>1−x</sub>N Epitaxial Films

The nanotribological properties of aluminum gallium nitride (Al<sub>x</sub>Ga<sub>1−x</sub>N) epitaxial films grown on low-temperature-grown GaN/AlN/Si substrates were investigated using a nanoscratch system. It was confirmed that the Al compositions played an important role, which was directly infl...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Ngā kaituhi matua: Hua-Chiang Wen, Ssu-Kuan Wu, Cheng-Wei Liu, Jin-Ji Dai, Wu-Ching Chou
Hōputu: Artigo
Reo:Inglês
I whakaputaina: MDPI AG 2023-10-01
Rangatū:Nanomaterials
Ngā marau:
Urunga tuihono:https://www.mdpi.com/2079-4991/13/21/2884
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