A Preemptive Scan Speed Control Strategy Based on Topographic Data for Optimized Atomic Force Microscopy Imaging
Rapid advancement in the nanotechnology and semiconductor industries has driven the demand for fast, precise measurement systems. Atomic force microscopy (AFM) is a standout metrology technique due to its high precision and wide applicability. However, when operated at high speeds, the quality of AF...
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| Autors principals: | , , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2025-05-01
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| Col·lecció: | Actuators |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2076-0825/14/6/262 |
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