A Preemptive Scan Speed Control Strategy Based on Topographic Data for Optimized Atomic Force Microscopy Imaging

Rapid advancement in the nanotechnology and semiconductor industries has driven the demand for fast, precise measurement systems. Atomic force microscopy (AFM) is a standout metrology technique due to its high precision and wide applicability. However, when operated at high speeds, the quality of AF...

ver descrição completa

Detalhes bibliográficos

Principais autores:	Thi Thu Nguyen, Oyoo Michael Juma, Luke Oduor Otieno, Thi Ngoc Nguyen, Yong Joong Lee
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2025-05-01
coleção:	Actuators
Assuntos:	atomic force microscopy (AFM) high-speed atomic force microscopy (HS-AFM) adaptive control real-time control fast scanning
Acesso em linha:	https://www.mdpi.com/2076-0825/14/6/262
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!