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A Preemptive Scan Speed Control Strategy Based on Topographic Data for Optimized Atomic Force Microscopy Imaging

Rapid advancement in the nanotechnology and semiconductor industries has driven the demand for fast, precise measurement systems. Atomic force microscopy (AFM) is a standout metrology technique due to its high precision and wide applicability. However, when operated at high speeds, the quality of AF...

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Principais autores: Thi Thu Nguyen, Oyoo Michael Juma, Luke Oduor Otieno, Thi Ngoc Nguyen, Yong Joong Lee
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2025-05-01
Serier:Actuators
Fag:
atomic force microscopy (AFM)
high-speed atomic force microscopy (HS-AFM)
adaptive control
real-time control
fast scanning
Online adgang:https://www.mdpi.com/2076-0825/14/6/262
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