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Development of 8-inch Key Processes for Insulated-Gate Bipolar Transistor

Based on the construction of the 8-inch fabrication line, advanced process technology of 8-inch wafer, as well as the fourth-generation high-voltage double-diffused metal-oxide semiconductor (DMOS+) insulated-gate bipolar transistor (IGBT) technology and the fifth-generation trench gate IGBT technol...

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书目详细资料
Principais autores: Guoyou Liu, Rongjun Ding, Haihui Luo
格式: Artigo
语言:Inglês
出版: Elsevier 2015-09-01
丛编:Engineering
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在线阅读:http://www.sciencedirect.com/science/article/pii/S2095809916300133
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