Growth of c-axis AlN sputtered films on silicon-based substrates using 2D-TMD as nucleation layer
In RF filters based on bulk acoustic wave (BAW) resonators, AlN is a well-known piezo-active layer stacked between two molybdenum electrodes. The crystalline quality, e.g., the film texture along the c -axis of the AlN hexagonal lattice, has a direct effect on RF performances. However, the current c...
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| Autori principali: | , , , , , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
IOP Publishing
2026-01-01
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| Serie: | JPhys Materials |
| Soggetti: | |
| Accesso online: | https://doi.org/10.1088/2515-7639/ae453e |
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