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Achieving Hydrophobic Ultralow Dielectric Constant Polyimide Composites: Combined Efforts of Fluorination and Porous Fillers

Abstract The advancement of the microelectronics industry necessitates the use of interlayer insulation materials with low dielectric constants and high mechanical properties. In this paper, a new type of copolymerized fluorinated polyimide (PI) is synthesized, and mixed with polyhedral oligomeric s...

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Autors principals: Wanjing Zhao, Chonghao Lu, Hui Zhao, Jingshu Huang, Jun‐Wei Zha, Xianwu Cao, Robert K. Y. Li, Wei Wu
Format: Artigo
Idioma:Inglês
Publicat: Wiley-VCH 2022-09-01
Col·lecció:Macromolecular Materials and Engineering
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Accés en línia:https://doi.org/10.1002/mame.202200291
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