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A Theoretical and Simulation Analysis of the Sensitivity of SiNWs-FET Sensors

Theoretical study and software simulation on the sensitivity of silicon nanowires (SiNWs) field effect transistor (FET) sensors in terms of surface-to-volume ratio, depletion ratio, surface state and lattice quality are carried out. Generally, SiNWs-FET sensors with triangular cross-sections are mor...

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Bibliografiske detaljer
Principais autores: Yi Yang, Zicheng Lu, Duo Liu, Yuelin Wang, Shixing Chen, Tie Li
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2021-04-01
Serier:Biosensors
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Online adgang:https://www.mdpi.com/2079-6374/11/4/121
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