High‐Precision Silicon Microgrooves via Metal‐Assisted Chemical Etching (MACE) Using Electrospun Nanofibers
ABSTRACT Silicon nano/microstructures have attracted significant interest for their applications in electronics, sensors, and energy devices. However, conventional photolithography‐based fabrication processes face challenges such as high cost, procedural complexity, and limited scalability for large...
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| Asıl Yazarlar: | , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Wiley-VCH
2026-01-01
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| Seri Bilgileri: | Advanced Materials Interfaces |
| Konular: | |
| Online Erişim: | https://doi.org/10.1002/admi.202500578 |
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