High‐Precision Silicon Microgrooves via Metal‐Assisted Chemical Etching (MACE) Using Electrospun Nanofibers
ABSTRACT Silicon nano/microstructures have attracted significant interest for their applications in electronics, sensors, and energy devices. However, conventional photolithography‐based fabrication processes face challenges such as high cost, procedural complexity, and limited scalability for large...
Gorde:
| Egile Nagusiak: | , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Wiley-VCH
2026-01-01
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| Saila: | Advanced Materials Interfaces |
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1002/admi.202500578 |
| Etiketak: |
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