Electrical actuation of single-crystal diamond MEMS resonators at high temperatures
Achieving efficient low-voltage actuation of microelectromechanical system (MEMS) resonators in high-temperature environments poses a difficult topic due to the thermal interference and the risk of high-temperature failure. In this work, the single-crystal diamond (SCD) resonators fabricated through...
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| Hlavní autoři: | , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Taylor & Francis Group
2024-12-01
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| Edice: | Functional Diamond |
| Témata: | |
| On-line přístup: | http://dx.doi.org/10.1080/26941112.2024.2346085 |
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