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Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products

MEMS resonant sensing devices require both HF ( f ) and low dissipation or high quality factor ( Q ) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q produc...

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Principais autores: Guo Chen, Zilong Zhang, Keyun Gu, Liwen Sang, Satoshi Koizumi, Masaya Toda, Haitao Ye, Yasuo Koide, Zhaohui Huang, Meiyong Liao
פורמט: Artigo
שפה:Inglês
יצא לאור: IOP Publishing 2024-01-01
סדרה:Applied Physics Express
נושאים:
diamond
MEMS
cantilevers
resonance
high orders
גישה מקוונת:https://doi.org/10.35848/1882-0786/ad2027
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