Higher-order resonance of single-crystal diamond cantilever sensors toward high f‧Q products
MEMS resonant sensing devices require both HF ( f ) and low dissipation or high quality factor ( Q ) to ensure high sensitivity and high speed. In this study, we investigate the resonance properties and energy loss in the first three resonance modes, resulting in a significant increase in f‧Q produc...
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| Principais autores: | , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
IOP Publishing
2024-01-01
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| Series: | Applied Physics Express |
| Assuntos: | |
| Acceso en liña: | https://doi.org/10.35848/1882-0786/ad2027 |
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