Electrical actuation of single-crystal diamond MEMS resonators at high temperatures
Achieving efficient low-voltage actuation of microelectromechanical system (MEMS) resonators in high-temperature environments poses a difficult topic due to the thermal interference and the risk of high-temperature failure. In this work, the single-crystal diamond (SCD) resonators fabricated through...
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| Hoofdauteurs: | , , , , |
|---|---|
| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Taylor & Francis Group
2024-12-01
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| Reeks: | Functional Diamond |
| Onderwerpen: | |
| Online toegang: | http://dx.doi.org/10.1080/26941112.2024.2346085 |
| Tags: |
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