Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow axis during fast-axis operation, resulting in undesi...

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Номзүйн дэлгэрэнгүй

Үндсэн зохиолчид:	Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu, Wenjiang Shen
Формат:	Artigo
Хэл сонгох:	Inglês
Хэвлэсэн:	MDPI AG 2025-09-01
Цуврал:	Micromachines
Нөхцлүүд:	hybrid actuation piezoelectric actuator PZT (lead zirconate titanate) LiDAR
Онлайн хандалт:	https://www.mdpi.com/2072-666X/16/9/1072
Шошгууд:	Шошго нэмэх Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!