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Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow axis during fast-axis operation, resulting in undesi...

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Bibliografiske detaljer
Principais autores: Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu, Wenjiang Shen
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2025-09-01
Serier:Micromachines
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Online adgang:https://www.mdpi.com/2072-666X/16/9/1072
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