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The effects of the post-annealing with a Zn cap on the structural and electrical properties of sol-gel derived MgxZn1−xO films

Structural and electrical properties of Al-doped Mg _x Zn _1−x O films were improved by post-annealing with supplying Zn vapor. The Al-doped Mg _x Zn _1−x O films were deposited on glass substrates by a sol-gel method. The substrates were dip-coated with a precursor solution and were dried on a hotp...

Ausführliche Beschreibung

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Bibliografische Detailangaben
Hauptverfasser: Koji Abe, Yasuhiro Morimoto
Format: Artigo
Sprache:Inglês
Veröffentlicht: IOP Publishing 2021-01-01
Schriftenreihe:Materials Research Express
Schlagworte:
Online-Zugang:https://doi.org/10.1088/2053-1591/abe5f2
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