In Situ and Real-Time Nanoscale Monitoring of Ultra-Thin Metal Film Growth Using Optical and Electrical Diagnostic Tools

Continued downscaling of functional layers for key enabling devices has prompted the development of characterization tools to probe and dynamically control thin film formation stages and ensure the desired film morphology and functionalities in terms of, e.g., layer surface smoothness or electrical...

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Principais autores:	Jonathan Colin, Andreas Jamnig, Clarisse Furgeaud, Anny Michel, Nikolaos Pliatsikas, Kostas Sarakinos, Gregory Abadias
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2020-11-01
coleção:	Nanomaterials
Assuntos:	real-time monitoring polycrystalline film growth growth dynamics interface reactivity adatom mobility wafer curvature
Acesso em linha:	https://www.mdpi.com/2079-4991/10/11/2225
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