Development of Thin Films Formed by Ti-Zr Alloys at Different Frequencies by the HiPIMS Technique

In this work, thin films based on the Ti-Zr system were studied, deposited on a silicon substrate by the magnetron sputtering technique using simultaneously a combination of High-Power Impulse Magnetron Sputtering (HiPIMS) and Direct Current Magnetron Sputtering (DCMS) sources. The objective of this...

पूर्ण विवरण

ग्रंथसूची विवरण

मुख्य लेखकों:	C. J. R. Lustosa, J. Stryhalski, R. L. P. Gonçalves, E. Bonturim, O. Florêncio, M. Massi
स्वरूप:	Artigo
भाषा:	Inglês
प्रकाशित:	Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2023-07-01
श्रृंखला:	Materials Research
विषय:	Ti-Zr alloy thin film HiPIMS biomaterial
ऑनलाइन पहुंच:	http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392023000200237&tlng=en
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