Design and Simulation of High-Temperature Micro-Hotplate for Synthesis of Graphene Using uCVD Method

The uCVD (microchemical vapor deposition) graphene growth system is an improved CVD system that is suitable for scientific research and experimental needs, and it is characterized by its rapid, convenient, compact, and low-cost features. The micro-hotplate based on an SOI wafer is the core component...

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Autors principals:	Lvqing Bi, Bo Hu, Dehui Lin, Siqian Xie, Haiyan Yang, Donghui Guo
Format:	Artigo
Idioma:	Inglês
Publicat:	MDPI AG 2024-03-01
Col·lecció:	Micromachines
Matèries:	micro-hotplate microchemical vapor deposition (uCVD) temperature uniformity suspended multi-cantilever selective doping process
Accés en línia:	https://www.mdpi.com/2072-666X/15/4/445
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