Design and Analysis of Lithium–Niobate-Based Laterally Excited Bulk Acoustic Wave Resonator with Pentagon Spiral Electrodes
In this paper, we present a comprehensive study on the propagation and dispersion characteristics of A<sub>1</sub> mode propagating in Z-cut LiNbO<sub>3</sub> membrane. The A<sub>1</sub> mode resonators with pentagon spiral electrodes utilizing Z-cut lithium niobate (LiNbO<sub>3</sub>) thin film are...
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| Autori principali: | , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2023-02-01
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| Serie: | Micromachines |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2072-666X/14/3/552 |
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