Advanced Etching Techniques of LiNbO₃ Nanodevices

Single LiNbO₃ (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain r...

Popoln opis

Bibliografske podrobnosti

Principais autores:	Bowen Shen, Di Hu, Cuihua Dai, Xiaoyang Yu, Xiaojun Tan, Jie Sun, Jun Jiang, Anquan Jiang
Format:	Artigo
Jezik:	Inglês
Izdano:	MDPI AG 2023-10-01
Serija:	Nanomaterials
Teme:	ferroelectric memory LiNbO<sub>3</sub> dry etching wet etching proton exchange
Online dostop:	https://www.mdpi.com/2079-4991/13/20/2789
Oznake:	Označite Brez oznak, prvi označite!