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Advanced Etching Techniques of LiNbO<sub>3</sub> Nanodevices

Single LiNbO<sub>3</sub> (LNO) crystals are widely utilized in surface acoustic wave devices, optoelectronic devices, and novel ferroelectric memory devices due to their remarkable electro-optic and piezoelectric properties, and high saturation and remnant polarizations. However, challenges remain r...

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Bibliografische gegevens
Hoofdauteurs: Bowen Shen, Di Hu, Cuihua Dai, Xiaoyang Yu, Xiaojun Tan, Jie Sun, Jun Jiang, Anquan Jiang
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI AG 2023-10-01
Reeks:Nanomaterials
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Online toegang:https://www.mdpi.com/2079-4991/13/20/2789
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