Insight into the Propagation of Interface Acoustic Waves in Rotated YX-LiNbO<sub>3</sub>/SU-8/Si Structures
The propagation of interface acoustic waves (IAWs) along rotated YX-LiNbO<sub>3</sub>/SU-8/ZX-Si structures is theoretically investigated to identify the Y-rotation angles that support the efficient propagation of low-loss modes guided along the structure’s interface. A three-dimensional finite elem...
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| Główni autorzy: | , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI AG
2025-07-01
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| Seria: | Micromachines |
| Hasła przedmiotowe: | |
| Dostęp online: | https://www.mdpi.com/2072-666X/16/8/861 |
| Etykiety: |
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