Insight into the Propagation of Interface Acoustic Waves in Rotated YX-LiNbO₃/SU-8/Si Structures

The propagation of interface acoustic waves (IAWs) along rotated YX-LiNbO₃/SU-8/ZX-Si structures is theoretically investigated to identify the Y-rotation angles that support the efficient propagation of low-loss modes guided along the structure’s interface. A three-dimensional finite elem...

ver descrição completa

Detalhes bibliográficos

Principais autores:	Cinzia Caliendo, Massimiliano Benetti, Domenico Cannatà, Farouk Laidoudi
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2025-07-01
coleção:	Micromachines
Assuntos:	SAW LSAW IAW LiNbO<sub>3</sub> SU-8 Si
Acesso em linha:	https://www.mdpi.com/2072-666X/16/8/861
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!