Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Background: Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons.Results: We report on a new contrast mechanism that extends the high surface sensitivity that i...

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Autors principals:	Gregor Hlawacek, Vasilisa Veligura, Stefan Lorbek, Tijs F. Mocking, Antony George, Raoul van Gastel, Harold J. W. Zandvliet, Bene Poelsema
Format:	Artigo
Idioma:	Inglês
Publicat:	Beilstein-Institut 2012-07-01
Col·lecció:	Beilstein Journal of Nanotechnology
Matèries:	channeling contrast mechanism helium ion microscopy ion scattering thin layers
Accés en línia:	https://doi.org/10.3762/bjnano.3.58
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