Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
Background: Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons.Results: We report on a new contrast mechanism that extends the high surface sensitivity that i...
I tiakina i:
| Ngā kaituhi matua: | , , , , , , , |
|---|---|
| Hōputu: | Artigo |
| Reo: | Inglês |
| I whakaputaina: |
Beilstein-Institut
2012-07-01
|
| Rangatū: | Beilstein Journal of Nanotechnology |
| Ngā marau: | |
| Urunga tuihono: | https://doi.org/10.3762/bjnano.3.58 |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
|
