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Deformation mechanism of metastable oriented grains in high-purity tantalum under different strain paths

High-purity tantalum is used as the sputtering target material for integrated circuits, requiring fine grains and random texture. Understanding different orientation deformation mechanisms, especially the metastable orientation (here {112} crystallographic orientations), is beneficial for controllin...

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Bibliografiske detaljer
Principais autores: Yahui Liu, Qianqian Zhu, Xiaokang Yang, Jing Chen, Yuhai Qu
Format: Artigo
Sprog:Inglês
Udgivet: Elsevier 2024-05-01
Serier:Journal of Materials Research and Technology
Fag:
Online adgang:http://www.sciencedirect.com/science/article/pii/S2238785424010299
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