Optimization of selective laser-induced etching (SLE) for fabrication of 3D glass microfluidic device with multi-layer micro channels

Abstract We present the selective laser-induced etching (SLE) process and design guidelines for the fabrication of three-dimensional (3D) microfluidic channels in a glass. The SLE process consisting of laser direct patterning and wet chemical etching uses different etch rates between the laser modif...

Descripció completa

Dades bibliogràfiques

Autors principals:	Sungil Kim, Jeongtae Kim, Yeun-Ho Joung, Sanghoon Ahn, Jiyeon Choi, Chiwan Koo
Format:	Artigo
Idioma:	Inglês
Publicat:	SpringerOpen 2019-10-01
Col·lecció:	Micro and Nano Systems Letters
Matèries:	Glass micromachining 3D laser micromachining Selective laser-induced etching Subtractive manufacturing 3D microchannel Glass microfluidic device
Accés en línia:	http://link.springer.com/article/10.1186/s40486-019-0094-5
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!