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Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS...

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Principais autores: Shaolin Zhang, Zhi Li, Qiu Wang, Yuanxia Yang, Yongzhen Wang, Wen He, Jinquan Liu, Liangcheng Tu, Huafeng Liu
Format: Artigo
Sprog:Inglês
Udgivet: MDPI AG 2023-12-01
Serier:Micromachines
Fag:
MEMS
capacitive
accelerometer
second-order nonlinearity
vibration rectification error
Online adgang:https://www.mdpi.com/2072-666X/15/1/65
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