System level simulation and fabrication of SOI-MEMS differential Capacitive accelerometer
This study primarily covers the design and development of an MEMS based accelerometer. Frequency, displacement sensitivity, and capacitance are the subject of analytical modelling; the corresponding values are found to be 7.41kHz, 4.5096∗10−9 m/g, and 0.289pF respectively. COMSOL Multiphysics is use...
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| Główni autorzy: | , , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Tamkang University Press
2024-01-01
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| Seria: | Journal of Applied Science and Engineering |
| Hasła przedmiotowe: | |
| Dostęp online: | http://jase.tku.edu.tw/articles/jase-202403-27-3-0012 |
| Etykiety: |
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