Analysis of the Frequency-Dependent Vibration Rectification Error in Area-Variation-Based Capacitive MEMS Accelerometers

The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS...

पूर्ण विवरण

ग्रंथसूची विवरण

मुख्य लेखकों:	Shaolin Zhang, Zhi Li, Qiu Wang, Yuanxia Yang, Yongzhen Wang, Wen He, Jinquan Liu, Liangcheng Tu, Huafeng Liu
स्वरूप:	Artigo
भाषा:	Inglês
प्रकाशित:	MDPI AG 2023-12-01
श्रृंखला:	Micromachines
विषय:	MEMS capacitive accelerometer second-order nonlinearity vibration rectification error
ऑनलाइन पहुंच:	https://www.mdpi.com/2072-666X/15/1/65
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