Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting
In wafer fabrication, it is imperative to minimize the transient process of cluster tools for the sake of on-demand and preventive maintenance. Due to the trend of multi-type and small-batch production, transient processes appear more and more frequently. Thus, the optimization problems of transient...
Kaydedildi:
| Asıl Yazarlar: | , , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
IEEE
2021-01-01
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| Seri Bilgileri: | IEEE Access |
| Konular: | |
| Online Erişim: | https://ieeexplore.ieee.org/document/9389780/ |
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