Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting
In wafer fabrication, it is imperative to minimize the transient process of cluster tools for the sake of on-demand and preventive maintenance. Due to the trend of multi-type and small-batch production, transient processes appear more and more frequently. Thus, the optimization problems of transient...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
IEEE
2021-01-01
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| Col·lecció: | IEEE Access |
| Matèries: | |
| Accés en línia: | https://ieeexplore.ieee.org/document/9389780/ |
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