Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets
Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It is crucial to increase their productivity by their effective operation. With structural complexity, multiple robots, and the interaction among individual tools, it is very challenging to schedule a tree-like mu...
Αποθηκεύτηκε σε:
| Κύριοι συγγραφείς: | , , , |
|---|---|
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
IEEE
2016-01-01
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| Σειρά: | IEEE Access |
| Θέματα: | |
| Διαθέσιμο Online: | https://ieeexplore.ieee.org/document/7445820/ |
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