Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net

Nowadays, cluster tools tend to concurrently process multiple types of wafers with similar recipes in order to improve their utilization and flexibility in semiconductor manufacturing. Different wafer types may have different wafer flow patterns, resulting in that cluster tools are deadlock-prone. I...

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Auteurs principaux:	Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu
Format:	Artigo
Langue:	Inglês
Publié:	IEEE 2021-01-01
Collection:	IEEE Access
Sujets:	Cluster tool Petri nets semiconductor manufacturing wafer fabrication
Accès en ligne:	https://ieeexplore.ieee.org/document/9422735/
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