Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications
We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structures (LIPSS) ar...
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| Autori principali: | , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI AG
2020-12-01
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| Serie: | Proceedings |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/2504-3900/56/1/13 |
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