Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary...
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| Format: | Artigo |
| Sprache: | Inglês |
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MDPI AG
2022-05-01
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| Schriftenreihe: | Micromachines |
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| Online-Zugang: | https://www.mdpi.com/2072-666X/13/5/743 |
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