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Plasma parameters in 40 MHz Argon discharge

Experimental data related to 40 MHz Argon plasma parameters in the RF power and pressure ranges of 25–200 W and 0.2–0.5 Torr are presented. Electron temperatures are obtained using both double probe and optical spectroscopy methods. Acceptable consistency between results is obtained. Double probe me...

Ausführliche Beschreibung

Gespeichert in:
Hauptverfasser: A.A. Azooz, S. Cakir, D.A. Bleej
Format: Artigo
Sprache:Inglês
Veröffentlicht: Elsevier 2015-01-01
Schriftenreihe:Results in Physics
Schlagworte:
Automated plasma diagnostics
Double probe
Argon plasma
Langmuir probe
Spectroscopic plasma diagnostics
40 GHz RF plasma
Online-Zugang:http://www.sciencedirect.com/science/article/pii/S2211379715000066
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